Optical Functionality Simulation Through Traceable Characterization of Optical Components

Abstract

The production of high-value components containing functional micro- and submicron-scale features requires the implementation of high-quality in-process inspection technologies to guarantee zero-defect manufacturing, boosting the transition to digital manufacturing. In the present study, the impact of the measurement uncertainty assigned to surface micro- and submicron-structures on the optical performance of a one-dimensional diffraction grating was determined. Thus, 3D confocal microscopy was selected as an inspection technology, introducing measuring data and uncertainty values on an optical simulation model to evaluate the influence of those magnitudes on the irradiance profile of a light beam at a target plane after passing through the diffraction grating. To achieve this goal, the calibrated areal standards have been used in addition to good practice guides for instrument calibration combined with optical modeling to simulate the functional behavior of the optical device. Results proved that changes of hundreds of nanometers in the lateral dimensions of the grating profile lead to drastic deviations in the irradiance profile and, thus, deviation in the optical performance. Hence a change in the period and the structure width of the step grating to the limits of the calculated uncertainty (Nominal Period ± ux,y) supposes a change of down to a 50% of decrease in the maximum peak of the irradiance profile detected. Thanks to these results, it is possible to define a range in the grating device's performance depending on the dimensional surface characterization and its uncertainty. Moreover, an in-situ measurement approach has been designed for further product quality control.